so now that I've actually gotten to the point in the game where you get legion my perspective of the geth has completely changed.
I had to go out of character in order to turn down the money for just giving him to cerberus, since my shep is pretty much a pure renegade, badass, out for himself kind of guy.
I still want to kill all geth at some point (i think that's part of ME3?) but it's going to be a lot harder to make that decision now.